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KLA Tencor ait ii tool
Ait Ii Tool, supplied by KLA Tencor, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/product/ait+ii+tool/ait+ii+tool/us07315365-74-5-21
Average 90 stars, based on 1 article reviews
ait ii tool - by Bioz Stars, 2026-09
90/100 stars

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Article Title: System and methods for classifying anomalies of sample surfaces
Article Snippet: For patterned semiconductor wafers, the AIT II tool is a laser scanning inspection system from the assignee of the present application, KLA-Tencor Corporation, which may be used when inspecting such surfaces.



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